BioNanoBeam is a subgroup of Institute of Solid State Electronics of Vienna University of Technology. This group is Lead by Ass.Prof.Dr. Heinz D. Wanzenboeck. At this moment, there are two different focus of the research - FEBIP and Biotechnology.
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FEBIP stands for Focused Electron Beam Induced Processing which is a nanofabrication technique to deposit or etch different materials from nanostructures. There are several synonyms of FEBIP such as Focused Electron Beam Induced Deposition (FEBID), Focused Electron Beam Induced Etching (FEBIE), Electron Beam Induced Selective etching and deposition (EBISED) etc. FEBID is a mask-free, resist-free, direct write lithography technique where metals and dielectrics can be deposited in situ with a single process step.
Figure:FEBID process sketch which shows how a gas precursor is injected through a nozzle in proximity of the deposition area. A focused electron beam is promoting its decomposition and subsequent deposition, leading to a well-defined nanoscale deposit of the desired material.